Lithography - Etching Techniques
What is Etching? : Chemical etching in liquid or gaseous form is used to remove any barrier material not protected by photoresist. Figure of Merit/ Factors affecting etch quality 1. Selectivity 얼마나 특정 물질만 선택적으로 Etching 할 수 있는가? $ Selectivity = \cfrac{Etch\, rate\, of\, material\, to\, be\, etched}{Etch\, rate\, of\, material\, not\, to\, be\, etched} $ 2. Isotropy vs Anisotropy 3. Etch rate The ..
2021. 7. 19.
