lithography1 High NA EUV 이 글은 imec에 올라온 The case for High NA EUV: unlocking the next era of chip manufacturing를 번역한 글입니다.ReferencesHigh-NA EUV lithography: the next major step forward, imec Reading Room, October 2021Imec and ASML open joint High NA EUV Lithography Lab offering an early development platform to the leading-edge semiconductor ecosystem, imec press release, June 2024Imec demonstrates readiness of the High-N.. 2026. 6. 12. 이전 1 다음